一、引言以前,热敏元件应用最多的是热电偶、热敏电阻、铂金电阻以及pn结测温元件。应用这些元件,其外围设备复杂,有些还得进行线性化工作,这给实现元件的长寿命、高可靠性、高经济效益带来了困难,不得不使我们寻找别的途径。随着半导体技术的发展,敏感元件的集成化得到了研究。几年来,国外连续发表了这方面的报导。在国内,沈阳仪器仪表工艺研究所等单位在这方面也做了不少工作。但有关这方 First, the introduction Previously, the most used thermistor components are thermocouples, thermistors, platinum resistance and pn junction temperature measurement components. The use of these components, the peripheral devices are complex, some have to be linearized, which is to achieve long-life components, high reliability, high economic efficiency has caused difficulties, we have to find another way. With the development of semiconductor technology, the integration of sensitive components has been studied. In recent years, foreign countries have continuously published reports in this regard. In China, Shenyang Institute of Instrumentation Technology and other units have also done a lot of work in this area. But on this side