Kinetics and Thermodynamics Induced Step-bunching Instability on Semiconductor Surface

来源 :半导体光子学与技术：英文版 | 被引量 : 0次 | 上传用户：hongguoqwer

【摘要】

：

This paper introduces the basic kinetic and thermodynamic factors affecting step-bunching instability and derive the one-dimensional(1D) step motion equation ba

【作者】

：

BAI Lugang SHOU Xiang GAN Benx

【机构】

：

DepartmentofChemicalEngineering,CaoGroup,HuaianCollegeofInformationTechnology

【出处】

：

半导体光子学与技术：英文版

【发表日期】

：

2010年1期

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This paper introduces the basic kinetic and thermodynamic factors affecting step-bunching instability and derive the one-dimensional(1D) step motion equation based adatom diffusion equation for further analysis.The step-bunching instability is analyzed fo

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Kinetics and Thermodynamics Induced Step-bunching Instability on Semiconductor Surface

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