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本文提出一种低功耗埋沟式横向电压型集成压力传感器结构,并根据精确的工艺模型成功地进行了工艺计算机模拟程序和制作。实验表明,该器件可以在低功耗条件下具有很高的灵敏度和可靠的稳定性。
This paper presents a low-power buried-channel lateral voltage integrated pressure sensor structure, and based on the precise process model of the successful process of computer simulation program and production. Experiments show that the device can be highly sensitive and reliable under low-power conditions.