高性能极紫外、软X 射线单色仪的研制对高亮度同步辐射光源的应用具有十分重要的意义。对 Itou的变线距平面光栅单色仪作了详细的分析研究,发现它的光栅工作曲线几乎与单色仪的入、出射臂长度等参量无关,仅取决于单色仪设计的边界条件。其曲线方程和SX-700单色仪的完全类似。该单色仪不仅具有很好的光栅效率和高级次谐波抑制性能,而且有利于几条光束线共享一个电子储存环窗口的光路优化设计。 The development of high-performance extreme ultraviolet and soft X-ray monochromator is very important for the application of high brightness synchrotron light source. Itou’s variable pitch plane grating monochromator has been analyzed in detail, and found that its grating working curve is almost independent of the monochromator’s input and output arm length and other parameters, and only depends on the monochromator design boundary conditions. The equation of the curve is completely similar to that of the SX-700 monochromator. The monochromator not only has good grating efficiency and high subharmonic suppression performance, but also facilitates the optimization of the optical path for sharing several electronic storage ring windows with several beamlines.