本文介绍了四氯化硅汽化器的功能和结构特点。从双管板、积液程、换热管与管板连接结构和氢气分布器结构等方面对四氯化硅汽化器进行了设计阐述。给出了汽化器的压力试验顺序和无损检测方法。四氯化硅汽化器运行状况良好，说明了该汽化器的结构设计合理，为双管板换热器的设计提供了可供借鉴的经验。“,”The function and structure feature of silicon tetrachloride vaporizer are introduced. The design of double tube-sheets, effusion pass, connecting structure between heat exchange tube and tube-sheets, hydrogen distributor are expounded. The pressure test sequence and nondestructive detection method are given. The operation status of tetrachloride silicon vaporizer is good, which indicates that the structure design of vaporizer is reasonable and it provides reference for the design of double tube-sheets heat exchanger.