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据EE Times报道,光刻设备制造商Nanonex Corp.的创始人Stephen Chou日前在普林斯顿大学内发明了一种新的方法,简化了纳米压印光刻技术(Nanoimprint Lighography),并降低了纳米压印的模板成本。
According to EE Times, Stephen Chou, founder of litho-equipment maker Nanonex Corp., recently announced a new approach at Princeton University that simplifies Nanoimprint Lighography and reduces nanoimprint Template cost.