用溶胶-凝胶法制备了稳定透明的氧化铝溶胶,并采用提拉法镀膜工艺在石英毛细管内壁制备了氧化铝薄膜。研究表明,薄膜厚度随提拉速度的增加而增加,在提拉速度小于5.0 mm/s的情况下,厚度与提拉速度的平方根成正比;当n(ASB)∶n(H2O)=1∶100,提拉速度为1.0 mm/s时,ASB与H2O的摩尔比每增加0.01,薄膜厚度随之增加0.18μm左右。 A stable and transparent alumina sol was prepared by sol-gel method and an aluminum oxide thin film was prepared on the inner wall of quartz capillary by the Czochralski method. The results show that the thickness of the film increases with the increase of the pulling speed. When the pulling speed is less than 5.0 mm / s, the thickness is proportional to the square root of the pulling speed. When n (ASB): n (H2O) = 1: 100, when the pulling speed is 1.0 mm / s, the film thickness increases by about 0.18μm with each increase of molar ratio of ASB to H2O of 0.01.