论文部分内容阅读
推导出一组具有特殊择优取向的各向异性薄膜的椭偏公式,并以光轴沿着薄膜表面及光轴垂直薄膜表面的各向异性薄膜为例,分别在透明和吸收波段进行模拟计算,得到了椭偏谱的基本特征。
An ellipsometric formula for anisotropic films with special preferential orientation is deduced. Taking anisotropic films with optical axis along the film surface and perpendicular to the optical axis as an example, Obtained the basic characteristics of elliptical spectrum.