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为了比较Aeronex Gatekeeper纯化器和钯膜技术对移除氢气中的污染物的效率。超纯的氢气需求成倍的增长是第二代硅晶,是化合物半导体制程中必须的,如硅晶体的外延,MOCVD制程和第III-V代化合物。
To compare the efficiency of Aeronex Gatekeeper purifiers and palladium membrane technology to remove contaminants from hydrogen. The doubling of demand for ultrapure hydrogen is the second generation of silicon that is necessary for compound semiconductor manufacturing, such as epitaxial silicon, MOCVD, and III-V compounds.