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报道了电共沉积制备ＧａＡｓ簿膜的原理与工艺。通过优化工艺参数，在不同的基片上成功地得到了成分接近化学计量比的ＧａＡｓ薄膜。
The principle and process of preparing GaAs film by electro-co-deposition were reported. By optimizing the process parameters, GaAs thin films with near-stoichiometric composition were successfully obtained on different substrates.