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通过模拟试验 ,研究了气相缓蚀剂 (VPI)BF 60 5的使用工艺和作用规律并与亚硝酸二环己胺 (DICHAN)和碳酸环己胺 (CHC)进行了比较。结果表明 ,BF 60 5具有作用快速和成膜稳定等特点 ;实施时不需预挥发和预膜 ;既可用于密闭体系 ,也可用于有时打开的系统 ;其保护作用是基于在金属表面的物理吸附和化学吸附。试验结果为BF 60 5的现场应用提供了理论依据。
Through the simulation test, the using process and action law of VPI BF 60 5 were studied and compared with DICHAN and CHC. The results show that the BF 60 5 has the characteristics of fast action and stable film formation, without the need of pre-volatilization and pre-filming during the implementation. It can be used in closed systems as well as sometimes open systems. Its protection is based on the physical Adsorption and chemisorption. The test results provide a theoretical basis for the field application of BF 60 5.