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通过传统的迁移率谱分析技术获得的半导体异质结构的迁移率谱中经常存在映像峰,这些峰无实际的物理意义,却能降低真实载流子电学参数的精确度。提出一种最大熵法计算电导密度函数(迁移率谱)的优化方法,在熵达到极大值时,得到的电导密度概率分布最接近数据的真实分布,此时将实验误差对结果的影响降至最低,从而消除迁移率谱中的映像峰。在变磁场下对不同异质结构外延材料进行非接触霍尔测量,对采集的霍尔数据组分析计算结果表明:与传统的迁移率谱分析方法相比,通过此最大熵方法计算得到的迁移率谱是一条平滑定量的曲线,有效地消除了映像峰,提高了实验结果的精确性。
Imaging peaks often exist in the mobility spectra of semiconductor heterostructures obtained by traditional mobility analysis techniques. These peaks have no physical meaning and can reduce the accuracy of real carrier electrical parameters. A maximum entropy method is proposed to calculate the conductivity density function (mobility spectrum). When the entropy reaches the maximum value, the probability distribution of the conductivity density is closest to the true distribution of the data, and the influence of the experimental error on the result is reduced To a minimum, eliminating peak peaks in the mobility spectrum. Non-contact Hall measurements of different heterostructured epitaxial materials under varying magnetic field are carried out. The analysis and calculation of collected Hall data sets show that compared with the traditional mobility spectrum analysis method, the migration calculated by this maximum entropy method The rate spectrum is a smooth quantitative curve, effectively eliminating the image peaks, improve the accuracy of the experimental results.