论文部分内容阅读
由于标准InP/In0.53Ga0.47As短波红外探测器的响应波段为0.87~1.7μm,在高性能夜视中具有重要的应用。为了进一步利用夜天光在可见光区间的辐射能量,需要将InP/In0.53Ga0.47As短波探测器的光谱响应拓展到可见光,从而实现包含可见光和短波波段的宽光谱探测。通过特殊的材料设计和背减薄工艺,成功研制了可见光拓展的320×256 InP/InGaAs宽光谱红外探测器。采用增加滤光片的方法完成了器件在可见光、短波的成像演示,结果表明:目标在可见光、短波波段呈现出不同的特征信息,而不加滤光片的可见光拓展InP/InGaAs宽光谱红外探测器则探测到两个波段的信息,既包含目标的可见光信息同时也具有短波信息,从而实现了可见/短波双波段探测的效果,可显著提升对目标的探测能力。
As the standard InP / In0.53Ga0.47As shortwave infrared detector response band of 0.87 ~ 1.7μm, in the high-performance night vision has an important application. In order to further utilize the radiant energy of nighttime light in the visible range, it is necessary to expand the spectral response of the InP / In0.53Ga0.47As shortwave detector to visible light so as to realize wide spectrum detection including visible light and shortwave waveband. Through the special material design and back thinning process, successfully developed a visible light expansion of 320 × 256 InP / InGaAs wide-spectrum infrared detector. The imaging performance of the device in visible and shortwave was achieved by adding filters. The results show that the target exhibits different characteristic information in the visible and shortwave wavelengths, while the visible light without filter extends the InP / InGaAs wideband infrared detection The detector detects two bands of information, which includes both visible and short-wave information of the target, so as to achieve the effect of visible / shortwave dual-band detection and significantly improve the detection capability of the target.