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CdS films were prepared with chemical pyrolysis deposition (CPD) at 450℃ during film growth, and these CdS films were also annealed at different temperature from 200-500℃.The optical property of the CdS films before and after annealing was investigated at different measuring temperature from 10K to 300K. Optical absorption spectra show that the absorption edge is towards the shorter wavelengths, and the energy band gaps deduced from the plots of (α·hν)2 vs. hν are increased when the measuring temperature is decreased. The optical behaviors of the CdS films annealed at a certain temperature seem to have the similar tendency at different measuring temperature. Based on dEex/dT curve dependent on annealing temperature, some phenomena related microstructure in CdS films could be found.