论文部分内容阅读
介绍了对直流等离子体喷射镀膜设备中传热过程所进行的理论和实验研究，探讨影响上述复杂传热过程的各种因素的影响规律及各种因素之间的相互关系，以及对有效控制金刚石膜形成的影响程度．在理论研究的基础上，建立了射流温度分布以及辐射、寻热及基片热平衡等5组数学模型，并进行了编程计算，计算结果与实验结果对比，证明两者吻合很好．
The theoretical and experimental research on the heat transfer process in direct current plasma jet coating equipment is introduced. The influence laws of various factors affecting the complicated heat transfer process as well as the interrelation between various factors are discussed. The extent of film formation. Based on the theoretical research, five sets of mathematical models of jet temperature distribution, heat radiation and heat balance of substrate are established and programmed. The calculated results are in good agreement with the experimental results.