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作者研究了溅射过程中在辉光等离子体内导入氮对溅射TiC膜在钢基体上附着力的影响。采用自制划痕仪测定了膜的附着力,並用俄歇谱仪研究了膜与基体的界面。结果表明,反应气体N_2能够促使形成一个渐变的过渡界面,从而改善了TiC膜在钢基体上的附着力。本文还讨论了辉光等离子体与基体表面的相互作用。
The authors studied the effect of introducing nitrogen into the glow plasma during sputtering on the adhesion of a sputtered TiC film on a steel substrate. The adhesion of the film was measured by a homemade scratch tester. The interface between the film and the substrate was studied by Auger spectrometer. The results show that the reactive gas N 2 can promote the formation of a gradual transitional interface, thus improving the TiC film adhesion on the steel substrate. The paper also discusses the interaction of glow plasma with the substrate surface.