【摘 要】
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The N-Ag codoped ZnO films are deposited on quartz g/ass substrates by ultrasonic spray pyrolysis technology.The results indicate that the p-type conductivity i
【机 构】
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School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024
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The N-Ag codoped ZnO films are deposited on quartz g/ass substrates by ultrasonic spray pyrolysis technology.The results indicate that the p-type conductivity in ZnO films is greatly enhanced by the double acceptor codoping of N and Ag compared with that of Ag- and N-monodoped ZnO films, and the NAg codoped low-resistivity p-type ZnO films with the resistivity of 1.05 Ω.cm, relatively high carrier concentration of 5.43 x 1017 cm-3, and Hall mobility of 10.09 cm2 V-1s-1 are obtained under optimized conditions. This achievement confirms that ptype ZnO with acceptable properties for optoelectronic applications could be realized by simultaneous codoping with two potential acceptors.
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