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众所周知,玻璃钝化二极管(以下简称玻钝二极管)的关键性工艺是钝化工艺.在钝化过程中,必须要有惰性气体保护,通常用N_2.一般认为N_2的纯度越高越好.但是,我们发现并非如此.实际上氧在钝化过程中,起着微妙的影响,在N_2中含有一定量的O_2时,反而改善了二极管的性能,提高了成品率.因此使玻璃钝化工艺实现了以马福炉代替石英管,这对二极管的大批量生产,起着重要的作用.
As we all know, the glass passivation diode passivation process (passivation process) is the key process in the passivation process, you must have inert gas protection, usually with N2 is generally believed that the higher the purity of N2 as possible, but , We found that not so. In fact, oxygen in the passivation process plays a subtle influence in the N_2 contains a certain amount of O_2, but to improve the diode performance and improve the yield.Thus the glass passivation process to achieve The muffle furnace to replace the quartz tube, which is the diode mass production, plays an important role.