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用多孔氧化铝（ＡＡＯ）模板（孔径约 ２５０ ｎｍ，孔密度约 ５．３×１０~８ｃｍ~(－２)，厚度约 ６０μｍ）进行化学气相沉积（ＣＶＤ），成功地制备出大面积高度取向的碳纳米管有序阵列膜．用透射电子显微镜（ＴＥＭ）和扫描电子显微镜（ＳＥＭ）观察了阵列膜的表面形貌和碳纳米管的结构．发现碳纳米管的长度和管径取决于ＡＡＯ模板的厚度和孔径，碳纳米管的生长特性与模板的结构、催化剂颗粒、反应气体热解温度、流量比例以及沉积时间等因素有关．该方法工艺简便，可使碳纳米管的结构均匀一致，排列分立有序，形成一种有用的碳纳米管自组装有序阵列复合结构，且成本低，能实现大面积生长，非常利于碳纳米管基础与应用研究．
Chemical vapor deposition (CVD) was carried out using a porous alumina (AAO) template (pore size of about 250 nm, pore density of about 5.3 × 10 -8 cm -2, thickness of about 60 μm) Of carbon nanotube ordered array film. The surface morphology of the film and the structure of the carbon nanotubes were observed by transmission electron microscopy (TEM) and scanning electron microscopy (SEM). It is found that the length and diameter of carbon nanotubes depend on the thickness and pore size of the AAO template. The growth characteristics of the carbon nanotubes are related to the structure of the template, the temperature of the catalyst particles, the pyrolysis temperature of the reaction gas, the flow ratio and the deposition time. The method has the advantages of simple process, uniform structure of the carbon nanotubes and discrete and orderly arrangement, thereby forming a useful carbon nanotube self-assembled ordered array composite structure with low cost and large area growth, which is very beneficial to the carbon nanometer Pipe Foundation and Applied Research.