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采用真空气相沉积法在玻璃衬底上制备纳米级ZnO和CdS薄膜。研究掺In和热处理对ZnO、CdS薄膜结构、光学特性的影响。实验给出 ,适当掺杂能够明显改善纳米ZnO、CdS薄膜的物相结构 ,ZnO薄膜的晶粒尺寸随掺杂含量的增加而减小 ,CdS薄膜晶粒尺寸随掺杂含量的增加而变大 ,但薄膜的光透射性有所降低。在短波范围内 ,ZnO薄膜的光透率好于CdS薄膜 ;在 5 0 0nm～ 1 0 0 0nm范围内 ,CdS薄膜的光透率好。掺In后ZnO薄膜的光学带宽从 3 2eV减小至 2 85eV ;掺In后CdS薄膜光学带宽从 2 4 2eV减小至 2 35eV。
Preparation of nanoscale ZnO and CdS thin films on glass substrates by vacuum vapor deposition. The effect of doping In and heat treatment on the structure and optical properties of ZnO, CdS thin films was investigated. The experimental results show that proper doping can obviously improve the phase structure of ZnO and CdS thin films. The grain size of ZnO thin films decreases with the increase of doping content. The grain size of CdS thin films increases with the doping content , But the light transmittance of the film is somewhat reduced. In the short wavelength range, the optical transmittance of ZnO thin films is better than that of CdS thin films. In the range of 500 ~ 1000 nm, the optical transmittance of CdS thin films is good. The optical bandwidth of the ZnO film decreases from 3 2eV to 2 85eV after doping with In. The optical bandwidth of the CdS film decreases from 2 4 2eV to 2 35eV after doping with In.