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提出了一种基于微光机电系统的可用于投影显示及相关器件的新型光栅光调制器,介绍了其结构、工作原理和加工流程。对器件进行光学分析,优化和仿真,得出器件结构参数与光学特性之间关系。器件的可动光栅占空比e=0.5,光栅常数d=6μm,长度L=39μm,宽度w=36μm,边距w0=1.5μm时,理论上±1级衍射效率η=37.0%,对比度V=625;可动光栅与下电极在开态和关态时间距分别为0.65μm和0.78μm,器件单像素尺寸为51μm×51μm。
A new type of grating optical modulator based on micro-electro-mechanical system for projection display and related devices is proposed. Its structure, working principle and processing flow are introduced. Optical analysis, optimization and simulation of the device, the relationship between the structure parameters of the device and the optical properties was obtained. In the device, the ± 1 order diffraction efficiency η = 37.0% and the contrast ratio V (%) were theoretically obtained when the movable grating duty cycle e = 0.5, the grating constant d = 6μm, the length L = 39μm, the width w = 36μm and the margin w0 = = 625; the movable grating and the lower electrode are 0.65 μm and 0.78 μm in on-state and off-state, respectively, and the single pixel size of the device is 51 μm × 51 μm.