在硅材料切、磨、抛加工工艺技术中,化学减薄腐蚀对去除机械加工过程产生的损伤层、减小硅片两面的失配应力,改善硅片的弯曲度指标等都有重要的作用,因此对硅材料的腐蚀研究是硅材料加工工艺技术中的一个重要课题.本文主要讨论硅材料碱腐蚀的作用原理并对碱腐蚀试验结果作了分析. In silicon cutting, grinding, throwing processing technology, chemical thinning corrosion on the removal of mechanical damage generated during processing, reducing the mismatch stress on both sides of the silicon wafer to improve the curvature of the silicon indicators have an important role , So the research on corrosion of silicon material is an important issue in silicon material processing technology.This paper mainly discusses the action principle of alkali corrosion of silicon material and analyzes the results of alkali corrosion test.