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生产高纯钼粉或钨粉的方法包括:(1)用双氧水分解钼粉或钨粉或分解氧化钼粉或氧化钨粉;(2)将所得钼或钨的水溶液与阳离子交换树脂接触;(3)浓缩该水溶液;(4)还原被浓缩的固态物。省去还原步骤(4),就可获得高纯氧化钼粉或氧化钨粉。由于用此发明的方法所制备的钼粉与钨粉及三氧化钼粉与三氧化钨粉的纯度非常高,故它们可用作制造超大规模集成电路元件的靶材料。
The method for producing high-purity molybdenum powder or tungsten powder includes: (1) decomposing molybdenum powder or tungsten powder or decomposing molybdenum oxide powder or tungsten oxide powder with hydrogen peroxide; (2) contacting the obtained aqueous solution of molybdenum or tungsten with a cation exchange resin; 3) concentrating the aqueous solution; and (4) reducing the concentrated solid. Eliminating the reduction step (4), high purity molybdenum oxide powder or tungsten oxide powder can be obtained. Since the molybdenum powder and tungsten powder and the molybdenum trioxide powder and tungsten trioxide powder prepared by the method of the present invention have very high purity, they can be used as the target material for manufacturing VLSI devices.