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建立了热释电钽酸锂薄膜红外探测器理论模型,用五层薄膜系统模拟了探测器结构,用钽酸锂晶体参数,模拟了探测器结构参数与探测率等性能指标之间的关系,研究了硅衬底厚度和钽酸锂薄膜厚度对探测器性能的影响。模拟结果显示,硅衬底彻底腐蚀形成悬空结构是减小探测器热传导损耗的最有效途径;热释电钽酸锂膜层越薄,器件探测率越高。探测器电压响应同时取决于钽酸锂膜层厚度和探测器外接电路参数。使探测器整体性能最佳的钽酸锂膜层厚度为1～2μm。
The theoretical model of pyrolytic lithium tantalate thin film infrared detector was established. The structure of the detector was simulated by a five-layer thin film system. The relationship between the structural parameters of the detector and the detection rate was simulated by using lithium tantalate crystal parameters. The influence of the thickness of the silicon substrate and the thickness of the lithium tantalate film on the detector performance was investigated. Simulation results show that the complete etching of the silicon substrate to form a floating structure is the most effective way to reduce the thermal conduction loss of the detector. The thinner the pyrolytic lithium tantalate film is, the higher the detection rate of the device is. The detector voltage response also depends on the thickness of the lithium tantalate film and the probe’s external circuit parameters. The best overall performance of the detector lithium tantalate film thickness of 1 ~ 2μm.