用扫描电镜研究了燃焰法沉积金刚石薄膜的成核与生长行为．分析了从成核至形成连续膜期间金刚石晶粒的生长特点．研究了沉积时间对金刚石薄膜晶体形态和表面形貌的影响。 The nucleation and growth behavior of diamond film deposited by flame combustion method was studied by scanning electron microscopy. The growth characteristics of diamond grains during nucleation to continuous film formation were analyzed. The effects of deposition time on the morphology and surface morphology of diamond films were investigated.