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利用脉冲高能量密度等离子体(ＰＨＥＤＰ)表面改性技术,在４５号钢、γ不锈钢等试样上获得ＡｌＮ膜．采用ＸＲＤ,ＸＰＳ和ＴＥＭ等方法研究了改性膜的组织结构．研究表明,改性膜是由１０ｎｍ尺寸的ＡｌＮ相组成．ＡｌＮ相结构随基体的结构而异．在具有面心立方结构的基体上．形成具有面心立方结构的ｃ－ＡｌＮ相、而在体心立方的基体上形成六方ｈ－ＡｌＮ相．从热力学角度,讨论了ＰＨＥＤＰ表面改性中ＡｌＮ形成的特性．
AlN films were obtained on samples such as steel 45 and γ stainless steel by pulsed high energy density plasma (PHEDP) surface modification. The structure of the modified membrane was studied by XRD, XPS and TEM. Studies have shown that the modified film is composed of a 10 nm size AlN phase. AlN phase structure varies with the structure of the matrix. On face-centered cubic structures. A c-AlN phase having a face-centered cubic structure is formed while a hexagonal h-AlN phase is formed on a body-centered cubic matrix. From the thermodynamic point of view, the formation of AlN in PHEDP surface modification was discussed.