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针对二极式场致发射显示器(field emission display,FED)驱动电压过高的问题,没计制作了前栅极式三极结构纳米ZnO场致发射显示器,并进行了场致发射实验,验证这种结构的可行性。前栅极结构采用喷砂工艺结合光刻技术,制作出微细的栅孔结构,实现丫较低电压的控制。同时对影响场致发射性能的栅极电压、栅孔开口尺寸和介质层厚度进行了分析讨论。实验结果表明:采用三极结构四针状纳米ZnO场致发射显示器具有良好的发射性能,是一种有前途的场致发射显示器。
In view of the problem that the driving voltage of the field emission display (FED) is too high, a front gate type three-pole nano-ZnO field emission display has not been fabricated and a field emission experiment has been conducted to verify this Feasibility of species structure. The front gate structure using sand blasting technology combined with lithography technology to produce a fine grid structure to achieve a lower voltage Ya control. At the same time, the gate voltage, gate opening size and dielectric layer thickness that affect the field emission performance were analyzed and discussed. The experimental results show that the three-electrode structure of four needle ZnO nano-size field emission display has good emission performance and is a promising field emission display.