前言为了得到高精度、高质量的光栅盘、度盘、光栅尺等,目前国内外已有一些部门开始把集成电路工艺中使用的光刻胶应用到光学刻划方面来。光刻胶具有很高的分辨率和很强的抗蚀能力,因此用它能刻出很细的线条并能得到很好的边缘。但和火棉胶相比,它的感光灵敏 Preface In order to obtain high-precision, high-quality grating disk, dial, grating, etc., at present, some departments at home and abroad have begun to apply the photoresist used in integrated circuit technology to optical scribing. Resist with high resolution and strong resist ability, so use it to engrave very thin lines and get a good edge. But compared with cotton collodion, it’s sensitive to light