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单晶炉是生长大规模集成电路所需要硅单晶的专用设备。本文主要介绍了单晶炉的真空系统与充气系统的设计。
Single crystal furnace is the growth of large-scale integrated circuits required for silicon monocrystalline silicon special equipment. This article mainly introduces the design of single crystal furnace vacuum system and inflation system.