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由于同步辐射光学发展的需要,发展了长行程外形仪。长行程外形仪是一个可以达到纳米和纳弧度灵敏度和精度的小角度和表面外形的测量仪器,适用于大口径光学表面的高精度测量。可测量的面形除了平面、球面外,还有所有非球面,如圆柱面、圆锥面、抛物面、椭球面、双曲面、超环面、各种旋转面和其他非标准非球面。介绍了长行程外形仪的原理、应用和各种不同用途的长行程外形仪,包括实验室专用长行程外形仪、扫描五角棱镜长行程外形仪、在线测量长行程外形仪和便携式长行程外形仪、垂直扫瞄长行程外形仪、多功能长行程外形仪和纳米光学机。还介绍了长行程外形仪的精度和最新发展趋向,如提高测量精度的方法,大幅度地增加外形仪的测量范围和方便地进行二维零件测量等。
Due to the need for the development of synchrotron radiation, a long stroke profiler has been developed. The Long Stroke Profiler is a small angle and surface profile measuring instrument that achieves nanometer and nano-arc sensitivity and accuracy for high-precision measurement of large-aperture optical surfaces. Measurable surface shape in addition to the plane, the spherical surface, there are all aspherical surfaces, such as cylindrical, conical, parabolic, ellipsoid, hyperboloid, toroidal, all kinds of rotating surface and other non-standard aspherical. This paper introduces the principle, application and application of long trip profiler, and various long trip profilers, including long stroke profiler for laboratory, long stroke profiler for pentagonal prism scanning, long stroke profiler and long stroke profiler , Vertical scanning long stroke profiler, multi-function long stroke profiler and nano-optics. Also introduced the long stroke profiler accuracy and the latest development trends, such as ways to improve the measurement accuracy, significantly increase the measuring range of the profiler and easy two-dimensional part measurement.