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介绍了真空弧离子源的一种电阻触发工作方式。有别于典型金属蒸汽真空弧(Metal vapor vacuum arc,MEVVA)离子源的触发工作方式,该方式不需要高压触发脉冲发生器和高压隔离脉冲变压器,简化了电源系统。实验测量了采用电阻触法20-200A主弧电流下的引出离子流,结果表明离子流随主弧流增大。研究了不同阻值触发电阻的起弧情况,实验结果表明在一定电阻阻值范围内,触发电阻越大,触发越难成功。电阻增大使得触发时间增长,主弧上升沿变缓,但是对引出的离子流几乎没有影响。
A kind of resistance triggering mode of vacuum arc ion source is introduced. Unlike the triggering of a typical metal vapor vacuum arc (MEVVA) ion source, which eliminates the need for high-voltage trigger pulse generators and high-voltage isolated pulse transformers, simplifying the power system. The measured ion current of the main arc current of 20-200A by resistance method was measured. The results show that the ion current increases with the main arc current. The arcing conditions of different resistance triggering resistors are studied. The experimental results show that the larger the triggering resistance is, the more difficult the triggering is. The increased resistance causes the triggering time to increase and the rising edge of the main arc to slow, but has little effect on the induced ion flux.