【摘 要】
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Thin films comprising nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous-carbon(UNCD/a-C:H)composite films were experimentally investigated.The prepared films were grown on Si substrates by the coaxial arc plasma deposition method.They wer
【机 构】
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DepartmentofElectricalEngineering,DepartmentofElectricalEngineering
论文部分内容阅读
Thin films comprising nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous-carbon(UNCD/a-C:H)composite films were experimentally investigated.The prepared films were grown on Si substrates by the coaxial arc plasma deposition method.They wer
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