论文部分内容阅读
一、前言 60年代以来由于激光技术、微电子技术及微机技术在光学检测中越来越广泛的应用,显著地提高了光学栓测技术的精度与效率。不少检测设备正朝着智能化的方向发展。从检测原理上看,已从基于几何光学原理的经典的检测技术发展到基于波动光学原理的近代检测技术。例如光学面形检测技术中的富科(Foucauh)检验、朗契(Ronchi)检验发展到相位测量的干涉技术,直接测量出光学波面。在干涉计量领域内已从菲索千涉仪、泰曼干涉仪发展为数字干涉仪,从静态的干涉仪发展到动态的交流干涉仪,并且能实时测量,实时输
I. Introduction Since the 1960s, due to the increasingly wide application of laser technology, microelectronics technology and computer technology in optical inspection, the accuracy and efficiency of optical bolt measurement technology have been remarkably improved. Many testing equipment is moving in the direction of intelligent development. From the detection principle, it has been developed from the classical detection technology based on the principle of geometric optics to the modern detection technology based on the principle of fluctuating optics. For example, the Foucauh test in optical profiling technology and the Ronchi test develop interferometric techniques for phase measurement to directly measure optical wavefront. In the field of interferometry has been developed from the Fizeau interferometer, the Thaiman interferometer to a digital interferometer, from static interferometer to dynamic AC interferometer, and can real-time measurement, real-time transmission