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采用电子束蒸发混合膜料的方法制备了TiO2/ZrO2复合薄膜,研究了工艺条件(气体流量、沉积速率、基片温度、组份比)对其光学特性的影响。采用椭偏法测量了薄膜的折射率,分析了不同配比复合薄膜的色散特性,得出工艺参数与薄膜光学性能的相互关系,实现了不同折射率的配比。研究结果表明,无论TiO2/ZrO2摩尔比为1:1,1:2还是2:1,其折射率均随沉积温度的升高而增大,但温度升高致使薄膜折射率变化的幅度不大;复合薄膜的折射率随真空度的降低而降低;随着束流从100到160mA增加,复合薄膜的折射率从2.1699到2.2439略微增加;当TiO2/ZrO2比例分别为1:2,1:1和2:1时,薄膜的折射率相应为2.0886,2.1436和2.2584(d光),表明采用工艺优化和蒸镀混合膜料的方法实现折射率的配比仍然是一种行之有效的方法。
TiO2 / ZrO2 composite films were prepared by electron beam evaporation of mixed materials. The effects of process conditions (gas flow rate, deposition rate, substrate temperature and composition ratio) on the optical properties were studied. The refractive index of the films was measured by ellipsometry. The dispersion characteristics of the films with different ratios were analyzed. The relationship between the technological parameters and the optical properties of the films was obtained, and the ratio of different refractive indices was achieved. The results show that the refractive index increases with the increase of deposition temperature, no matter the TiO2 / ZrO2 molar ratio is 1: 1, 1: 2 or 2: 1. However, ; The refractive index of the composite film decreases with the decrease of the degree of vacuum; the refractive index of the composite film slightly increases from 2.1699 to 2.2439 with the increase of the beam current from 100 to 160mA; when the ratio of TiO2 / ZrO2 is 1: 2, 1: 1 And 2: 1, the refractive indexes of the films are 2.0886, 2.1436 and 2.2584 (d light) respectively, which indicates that the method of optimizing the process and the method of mixing the film materials by evaporation is still an effective method.