,Chemical Vapour Deposition Graphene Radio-Frequency Field-Effect Transistors

来源 :中国物理快报(英文版) | 被引量 : 0次 | 上传用户:alfred0612
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We report the dc and rf performance of graphene rf field-effect transistors,where the graphene films are grown on copper by using the chemical vapour deposition (CVD) method and transferred to SiO2/Si substrates.Composite materials,benzocyclobutene and atomic layer deposition Al2O3 are used as the gate dielectrics.The observation of n- and p-type transitions verifies the ambipolar characteristics in the graphene layers.While the intrinsic carrier mobility of CVD graphene is extracted to be 1200cm2/V·s,the parasitic series resistances are demonstrated to have a serious impact on device performance.With a gate length of 1 μm and an extrinsic transconductance of 72 mS/mm,a cutoff frequency of 6.6 GHz and a maximum oscillation frequency of 8.8 GHz are measured for the transistors,illustrating the potential of the CVD graphene for rf applications.
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