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为了研究添加粘接层对复合涂层的影响,采用脉冲反应溅射在316L不锈钢基体上制备了调制周期为700 nm左右(5层)的Y2O3/Er2O3复合涂层,通过调整氧氩比制备了不饱和氧化钇(YOx,x<1.5)作为粘接层,研究了添加粘接层对复合涂层相组成、组织形貌以及涂层与基底结合情况的影响。X射线衍射(XRD)、扫描电子显微镜(SEM)、结合力及纳米硬度分析结果表明,当氧分压为0.036 Pa制备YO1.401粘接层时,Y2O3/Er2O3/YOx涂层的结合力相比于Y2O3/Er2O3复合涂层,涂层与基体的结合力增大了约60%,纳米硬度增大了近30%,绝缘电阻率测试结果表明,Y2O3/Er2O3/YOx涂层绝缘电阻率在1×109Ω.cm~1×1011Ω.cm,绝缘性能良好。
In order to study the effect of adding adhesive layer on the composite coating, a Y2O3 / Er2O3 composite coating with a modulation period of about 700 nm (5 layers) was prepared on a 316L stainless steel substrate by pulse reactive sputtering and prepared by adjusting the oxygen-argon ratio Unsaturated yttrium oxide (YOx, x <1.5) was used as the adhesive layer to study the influence of the addition of adhesive layer on the phase composition, microstructure and the bond between the coating and the substrate. X-ray diffraction (XRD), scanning electron microscopy (SEM), cohesion and nanohardness analysis showed that the bonding strength of Y2O3 / Er2O3 / YOx coating when the oxygen partial pressure was 0.036 Pa Compared with the Y2O3 / Er2O3 composite coating, the bonding strength between the coating and the substrate increases by about 60% and the nanohardness increases by nearly 30%. The insulation resistivity test results show that the insulation resistivity of the Y2O3 / Er2O3 / 1 × 109Ω.cm to 1 × 1011Ω.cm, the insulation performance is good.