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以金刚石膜/硅复合材料作为基板,运用微加工技术在金刚石膜/硅衬底上光刻铬/金微条电极,制成了流气式微条气体室探测器。在室温及101.0kPa下,使用微机多道能谱仪及辅助电子学设备在5.9keV55FeX射线辐照下测量了微条气体室探测器在不同电压下的能谱响应和脉冲信号。结果表明微条气体室探测器具有较高的信噪比,计数率≥103Hz,当混合工作气体Ar:CH4=90:10、漂移电压-1000V、阴极电压-650V、阳极0V时,能量分辨率达12.3%。
Using diamond film / silicon composite as the substrate, chrome / gold micro-strip electrodes were micro-machined on the diamond film / silicon substrate to fabricate a flow-type microbubble gas chamber detector. At room temperature and 101.0kPa, the energy spectrum response and pulse signal of the micro-strip gas chamber detector at different voltages were measured under the irradiation of 5.9keV55FeX by using computer multi-channel energy dispersive spectrometer and auxiliary electronic equipment. The results show that the microstrip gas chamber detector has a high signal-to-noise ratio and the counting rate is ≥103Hz. When the mixed working gas Ar: CH4 = 90:10, drift voltage -1000V, cathode voltage -650V and anode 0V, the energy resolution Up to 12.3%.