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自从商业上介绍第一批电容压强计真空测量系统以来,各个部件及整个系统的设计和性能都有重大改进。许多研究人员报道了用这种精密测量技术来得到优异的实验结果,有些发表了关于部件(传感器,电子线路,读数部分)或整个系统的设计及性能改进的技术讨论。因而这就适于对改进作评述,并把电容压强计系统的性能与通常用于真
Since the commercial introduction of the first capacitive pressure gauge vacuum gauging system, there have been major improvements in the design and performance of individual components and the entire system. Many researchers have reported excellent experimental results with this sophisticated measurement technique and some have published technical discussions on the design and performance improvement of components (sensors, electronics, readings) or the entire system. This is therefore suitable for commenting on improvements and comparing the performance of a capacitive pressure gauge system with that commonly used in real