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According to the piezoelectric equation and the vibration theory of the quartz crystal,the relations between the vibrating frequency and structural parameters under the thickness-shear-vibration of AT-cut quartz crystal have been studied. The frequency conditions under which quartz crystal resonator formed stationary wave inside the electrode district and the transmission characteristics of wave outside the electrode district have also been discussed.A quartz crystal resonator was developed based on this analysis.The experiment showed that the force-sensing characteristics were independent of the fixation of the crystal edge.The detecting distinguish ability was up to 0.001°,and the short-term frequency stability was up to 1.38×10~ (-10)/min.
According to the piezoelectric equation and the vibration theory of the quartz crystal, the relations between the vibrating frequency and structural parameters under the thickness-shear-vibration of AT-cut quartz crystal have been studied. wave inside the electrode district and the transmission characteristics of wave outside the electrode district have also been discussed. A quartz crystal resonator was developed based on this analysis. The experiment showed that the force-sensing characteristics were independent of the fixation of the crystal edge. The detection of ability was up to 0.001 °, and the short-term frequency stability was up to 1.38 × 10 ~ (-10) / min.