论文部分内容阅读
本文介绍以被刻光栅本身作为分度基准刻划长衍射光栅的新方法:先用原基准信号控制机器,在一个长毛坯的前端刻出一段光栅,用这段光栅构成新的干涉仪以产生“自刻信号”,然后再以自刻信号控制机器接着刻划光栅后面的部分。还分析了转接误差对自刻光栅的影响,得出刻划长度和误差累积的关系。简单介绍了实验方案、装置、实验结果等。所刻样品光栅的衍射波阵面干涉条纹在转接处看不出错开和弯曲,实测分辨本领达到理论值的90％(半宽法)。
This paper presents a new method of scribing a long diffraction grating by using the engraved grating itself as a reference for indexing: first, the machine is controlled by the original reference signal, a grating is engraved on the front end of a long blank, and a new interferometer is used to generate a new interferometer “Self-engraved signal”, and then self-engraved signal control machine and then scored the back part of the grating. The influence of transfer error on self-engraved grating is also analyzed, and the relationship between the length of scribing and the cumulative error is obtained. Briefly introduced the experimental program, devices, experimental results. The diffraction grating of the sample grating diffraction fringe interference fringes can not see in the transition at the offset and bending, measured resolution ability to reach the theoretical value of 90% (half-width method).