本文用X射线荧光光谱法,不破坏样品,测定三元合金薄膜的组份。此法无需制备任何相似的固体标样或纯元素的块状标样,而是利用含已知组份的滤纸片作为标样。滤纸片标样制作简便、快速,并且能长期稳定。由薄膜中元素所发出的特征X射线强度与其面密度之间的一组联立方程解出薄膜成份,利用衬底中元素的特征X射线强度随膜厚增大而衰减的定量关系确定膜厚。利用本文的方法可以同时测定薄膜的成分和厚度。 In this paper, X-ray fluorescence spectrometry, without destroying the sample, the determination of ternary alloy film components. This method does not require the preparation of any similar solid standard or pure element block standard, but the use of filter paper containing known components as a standard sample. Filter paper standard sample production is simple, fast, and long-term stability. The film composition is solved by a set of simultaneous equations between the characteristic X-ray intensity emitted by the elements in the film and its areal density. The film thickness is determined by the quantitative relationship between the characteristic X-ray intensities of the elements in the substrate and the film thickness increasing . Using this method, the composition and thickness of the film can be simultaneously measured.