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通过对光电二极管结构和工作原理及光谱响应特性的分析,探讨了在相同工艺条件下,硅光电探测器的小光斑法测试过程中,不同大小光敏面得到不同光谱响应曲线问题。参考一维分析,建立了简化的二维分析方法,并做出定性的分析以及定量的计算,得到与测试一致的结果:光敏面积对响应率的光谱特性的影响为短波基本无变化,长波随光敏面积的减小而减小,为以后的测试改进提供了参考。
Through the analysis of the photodiode structure, working principle and spectral response characteristics, the problem of different spectral response curves of different size photosensitive surfaces in the process of small spot test of silicon photodetector under the same process conditions is discussed. With reference to the one-dimensional analysis, a simplified two-dimensional analysis method is established, and qualitative analysis and quantitative calculation are made. The results consistent with the test are obtained. The influence of the photosensitive area on the spectral characteristics of the response rate is basically unchanged, The decrease of the photosensitive area decreases, which provides a reference for future test improvement.