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采用时域有限差分(FDTD)法对中红外波段(3~5μm)硅基底的圆锥形仿生蛾眼微纳结构进行了仿真模拟。通过对微纳结构占空比、周期和刻蚀深度等参数的分析,获得了具有良好抗反射特性的微纳结构的组合参数。为了更好地指导实际加工,对不同参数进行了公差分析。制作中应用二元曝光技术和反应离子刻蚀技术在硅基底上制备得到该圆锥形仿生蛾眼微结构,并且使用热场发射扫描电子显微镜得到了该微结构的表面形貌图。采用红外成像光谱仪对单面微结构的测试结果表明,仿生蛾眼微结构的反射率在中红外波段约为5%。
The time-domain Finite Difference (FDTD) method was used to simulate the micro-nano structure of conical bionic moth in the mid-infrared (3-5 μm) silicon substrate. Through the analysis of the parameters such as the duty cycle, the period and the etching depth of the micro / nano structure, the combination parameters of the micro / nano structure with good antireflection properties were obtained. In order to better guide the actual processing, tolerance analysis of different parameters. The conical bionic moth-eye microstructure was prepared on a silicon substrate by using binary exposure and reactive ion etching techniques. The surface topography of the microstructure was obtained by using the thermal field emission scanning electron microscope. The test results of single-sided microstructure using infrared imaging spectrometer showed that the reflectivity of the bionic moth microstructure was about 5% in the mid-infrared band.