Effect of the Structure and Valence State on the Properties of VO2 Thin Films

来源 :半导体光子学与技术：英文版 | 被引量 : 0次 | 上传用户：slrjlc2009

【摘要】

：

VO2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural,

【作者】

：

LUYong LINLi－bin 等

【机构】

：

KeyLab.ofIrradiationPhysicsandTechnologyforMinistryofEducation,KeyLab.ofIrradiationPhysicsandTechnol

【出处】

：

半导体光子学与技术：英文版

【发表日期】

：

2001年2期

【关键词】

：

氧化钒薄膜相变薄膜结构 VO2 thin film Phase transition Film structure Valence state

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VO2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural, optical and electrical properties of the samples were characterized by using XRD、XPS、UV-VIS and

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Effect of the Structure and Valence State on the Properties of VO2 Thin Films

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