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设计了一款4位MEMS开关线式移相器,由SP4TMEMS开关和微带传输线构成,工作于X波段。单刀四掷(single pole 4throw,SP4T)开关用于切换两条不同电长度的信号通道,即参考相位通道和延迟相位通道。每个SP4T开关包含4个悬臂梁接触式RF MEMS串联开关。介绍了4位MEMS开关线式移相器的总体设计,并给出了其关键部件SP4T开关和相位延迟线的设计细节。采用ADS软件仿真分析了器件的电气性能。仿真分析得到:SP4T开关在中心频率10GHz处的回波损耗为-36dB,插入损耗约为0.18dB;移相器各相位的回波损耗均低于-15dB,插入损耗为-0.8～-0.4dB。这种射频MEMS移相器具有小型化、低功耗和高隔离度的优点。
A 4-bit MEMS switch-line phase shifter is designed by the SP4TMEMS switch and the microstrip transmission line to work in the X-band. The single pole fourthrow (SP4T) switch is used to switch between two signal paths of different electrical lengths, namely the reference phase channel and the delay phase channel. Each SP4T switch includes 4 cantilever contact RF MEMS series switches. The overall design of the 4-bit MEMS switch-line phase shifter is introduced, and the design details of its key components SP4T switch and phase delay line are given. ADS software simulation analysis of the electrical performance of the device. The simulation results show that the SP4T switch has a return loss of -36dB at the center frequency of 10GHz and an insertion loss of about 0.18dB. The return loss of each phase of the phase shifter is lower than -15dB and the insertion loss is -0.8 ~ -0.4dB . This RF MEMS phase shifter has the advantages of miniaturization, low power consumption and high isolation.