针对当前磁控溅射台存在真空自动准备和手动自动切换不完善等缺点,以DV602磁控溅射台为例,对其电控系统进行了改造。设计了以PLC为控制系统核心、以触摸屏为人机接口的电控系统,控制系统的可靠性和稳定性得到提高,且界面友好,操作方便。 In view of the disadvantages of current automatic vacuum sputtering preparation and manual automatic switching imperfection of the magnetron sputtering station, the electronic control system of DV602 magnetron sputtering station is taken as an example. The electronic control system with PLC as the control system core and touch screen as human-machine interface is designed. The reliability and stability of the control system are improved. The interface is friendly and the operation is convenient.