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提出一种用微细加工技术构制的二氧化碳薄膜微电极器件.这类器件具有常规微电极所特有的全部优点,而且结构紧凑,便于集成化.用作电流型二氧化碳气敏器件,在室温下有良好的工作特性:响应电流在整个CO_2浓度范围内呈线性,并通过原点;90%响应时间约30s;连续工作6h性能稳定,重现性好.
A carbon dioxide thin film microelectrode device fabricated by microfabrication technology is proposed, which has all the advantages of the conventional microelectrode and has the advantages of compact structure and convenient integration. As a current type carbon dioxide gas sensor, Good working characteristics: the response current is linear over the entire CO 2 concentration range and passes through the origin; 90% response time is about 30s; continuous operation 6h performance is stable, good reproducibility.