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为实现高精度量块表面粗糙度的快速、无损伤、自动化检测,研制了一套基于干涉图像处理的表面粗糙度检测系统。系统由干涉显微镜、数字CCD摄像头和计算机组成。待测量块表面经干涉显微镜所成的干涉图像由数字CCD摄像头采集并传输到计算机中,利用数字图像处理技术,对干涉条纹的边缘和中线进行提取,计算出量块表面粗糙度评定参数。提供了实测结果和测量不确定度评定,由测量重复性引起的不确定度为0.9nm,总的展伸不确定度为3nm。
In order to achieve rapid, non-destructive and automatic detection of surface roughness of high-precision measuring block, a set of surface roughness detection system based on interference image processing was developed. The system consists of an interference microscope, a digital CCD camera and a computer. The interference image of the surface of the block to be measured by the interference microscope is collected by the digital CCD camera and transmitted to the computer. The edge and center line of the interference fringe are extracted by using the digital image processing technology to calculate the evaluation parameters of the surface roughness of the measuring block. The measured results and measurement uncertainty are provided. The uncertainty due to measurement repeatability is 0.9 nm and the total stretching uncertainty is 3 nm.