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The Tm-Ni-Co alloy films have been prepared by the sweep potential deposition technique. The surface appearance of Tm-Ni-Co alloy films was silver, smooth and adhesive. The surfaces of Tm-Ni-Co alloy films observed by scanning electron microscope (SEM) were uniform, adhesive and compact. The sizes of metallic grains were about 80-100 nm, 100-200 amorphous as proven by the X-ray diffraction (XRD).