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An aerosol process for making aluminum nitride nano-powder by decomposition of single compound diethylaluminun azide was described. X-ray diffraction (XRD) and transmission electron microscopy (TEM) were used to study characters of the AIN powder. It is shown that the process can produce spherical AIN powder with mean particle diameters ranging from 10 to 50 nm at 500-800C. The generated amorphous AIN powder is characterized by a BET (Brunauer-Emmett-Teller) surface area of 103 m2/g and is very reactive to moisture.